Chip Manufacturing

Etching

Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing.

Etching is the removal of some portion of the thin film or substrate. The substrate is exposed to an etching (such as an acid or plasma) which chemically or physically attacks the film until it is removed.

Etching techniques include:

• Dry Etching (ex: reactive-ion etching)
• Web Etching (also called chemical etching)

• Photo from LTT intel fab tour video, 14:08